Nondestructive Characterization of Surface Contaminants in Silicon Wafers Using AC Surface Photovoltage Method
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Materials Transactions, JIM
سال: 1994
ISSN: 0916-1821,2432-471X
DOI: 10.2320/matertrans1989.35.827